Product Details
Each pressure plate of CP series chemical mechanical polishing machine with independent driving of pressure plate is driven by a separate servo reducer. Unlike the way that the central guide roller driven CP machine is driven by friction, the pressure plate independent driving CP machine can realize accurate speed control of pressure plate. At the same time, due to the structure of avoiding friction contact in the polishing area, the generation of crystal particles of polishing slurry is reduced, Thus, the probability of particle pollution and scratch on the surface of the wafer is reduced; The rotating speed of each pressure plate of IDP machine can be set separately. According to the characteristics of the pressurizing cylinder of each pressure plate, the processing results in almost zero difference between different pressure plates can be achieved by fine adjustment of the rotating speed of the pressure plates.
For IDP machines with large size, positioning and station switching of ceramic plates can be realized by adding internal and external guide rollers devices, so as to realize the loading and unloading in one station. It can also realize the connection of multiple machines by integrating manipulator to form an automatic production line.
IDP TYPE CP series chemical mechanical polishing machine
Type and spec |
CP-380B-IDP |
CP-460B-IDP |
CP-610B-IDP |
CP-810B-IDP |
Polishing Plate diameter |
381mm |
460mm |
610mm |
812mm |
Pressure plate diameter |
139mm |
150mm |
240mm |
304.8mm |
No. of pressure plate |
3 |
3 |
4 |
4 |
Polishing plate RPM |
10~160rpm |
10~160rpm |
10~115rpm |
10~87rpm |
Polishing pressure(max.) |
100kg |
100kg |
140kg |
250kg |
Pressure plate driven Motor power |
200W |
200W |
400KW |
400KW |
Pressure plate rotation speed |
0~200rpm |
0~200rpm |
0~100rpm |
0~100rpm |
Main Motor power |
0.75kw |
1.5kw |
3kw |
5.5KW |
Power supply |
3PH,380V,50Hz |
Dimension |
950L
770W
1560H
|
1100L
850W
1650H
|
1350L
900W
1700H
|
1600L
920W
1900H
|
Weight ( Approx..) |
350kg |
350kg |
980kg |
1800kg |
Wafer loading capacity |
2"-4pcs/head |
2"-4pcs/head |
2"-10pcs/head
4"-3pcs/head
|
2"-14pcs/head
4"-5pcs/head
5"-3pcs/head
|
Type and spec |
CP-910B-IDP |
CP-1280B-IDP |
CP-1500B-IDP |
Polishing Plate diameter |
914mm |
1282mm |
1500mm |
Pressure plate diameter |
360mm |
485mm |
576mm |
No. of pressure plate |
4 |
4 |
4 |
Polishing plate RPM |
10-80rpm |
10~64rpm |
10-54rpm |
Polishing pressure(max.) |
320kg |
560kg |
760kg |
Pressure plate driven Motor power |
2KW |
1KW |
1.3KW |
Pressure plate rotation speed |
2KW |
0~100rpm |
0~100rpm |
Main Motor power |
11kw |
22kw |
35kw |
Power supply |
3PH,380V,50Hz |
Dimension |
1800L
1262W
2120H
|
2180L
1670W
2200H
|
2800L
2020W
2500H
|
Weight ( Approx..) |
2200kg |
7000kg |
8600kg |
Wafer loading capacity |
4"-7pcs/head
5"-5pcs/head
6"-3pcs/head
|
5"-8pcs/head
6"-6pcs/head
8"-3pcs/head
|
6"-8pcs/head
8"5pcs/head
|
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